Charge dependence of nano-particle growth in silane plasmas under UV irradiation

C R Seon^1,3, W Choe^1,4, K B Chai¹, H Y Park¹ and S Park²

¹ Department of Physics, Korea Advanced Institute of Science and Technology, 335 Gwahangno, Yuseong-gu, Daejeon 305-701, Korea
² Korea Research Institute of Standards and Science, 1 Doryong-dong, Yuseong-gu, Daejeon 305-340, Korea

³ Present address: National Fusion Research Institute, 113 Gwahangno, Yuseong-gu, Daejeon 305-333, Korea.

⁴ Author to whom any correspondence should be addressed.

E-mail: wchoe@kaist.ac.kr

Abstract. The controlled generation of nano-particles has been an important issue for the nano-structure formation in processing plasmas. We observed that the particle growth under UV irradiation was enhanced due to electric charge reduction of the particles, suggesting that the variation of particle charges could be a control parameter for the particle growth. The particle growth variation by UV irradiation is well described by the particle coagulation model with time-dependent particle charges in consideration, where predator particles grow by adsorbing a few nanometer-sized proto-particles.

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