Charge
dependence of nano-particle growth in silane plasmas under UV
irradiation
C R Seon1,3, W Choe1,4,
K B Chai1, H Y Park1 and S Park2
1 Department of Physics, Korea Advanced Institute of
Science and Technology, 335 Gwahangno, Yuseong-gu, Daejeon
305-701, Korea
2 Korea Research Institute of Standards and Science,
1 Doryong-dong, Yuseong-gu, Daejeon 305-340, Korea
3 Present address: National Fusion Research
Institute, 113 Gwahangno, Yuseong-gu, Daejeon 305-333, Korea.
4 Author to whom any correspondence should be
addressed.
E-mail: wchoe@kaist.ac.kr
Abstract. The controlled
generation of nano-particles has been an important issue for the
nano-structure formation in processing plasmas. We observed that
the particle growth under UV irradiation was enhanced due to
electric charge reduction of the particles, suggesting that the
variation of particle charges could be a control parameter for
the particle growth. The particle growth variation by UV
irradiation is well described by the particle coagulation model
with time-dependent particle charges in consideration, where
predator particles grow by adsorbing a few nanometer-sized
proto-particles.